The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 08, 2012
Filed:
Jun. 30, 2008
Jason Augustino, Fremont, CA (US);
Armen Avoyan, Glendale, CA (US);
Yan Fang, Fremont, CA (US);
Duane Outka, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Stephen Whitten, Danville, CA (US);
Jason Augustino, Fremont, CA (US);
Armen Avoyan, Glendale, CA (US);
Yan Fang, Fremont, CA (US);
Duane Outka, Fremont, CA (US);
Hong Shih, Walnut, CA (US);
Stephen Whitten, Danville, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A carrier assembly is provided comprising a backside mounted electrode carrier and electrode mounting hardware. The backside mounted electrode carrier comprises an electrode accommodating aperture, which in turn comprises a sidewall structure that is configured to limit lateral movement of an electrode positioned in the aperture. The electrode accommodating aperture further comprises one or more sidewall projections that support the weight of an electrode positioned in the aperture. The electrode mounting hardware is configured to engage an electrode positioned in the electrode accommodating aperture from the backside of the carrier and urge the electrode against the sidewall projections so as to limit axial movement of the electrode in the electrode accommodating aperture. Additional embodiments of broader and narrower scope are contemplated.