Fremont, CA, United States of America

Stephen Hsu


Average Co-Inventor Count = 4.1

ph-index = 6

Forward Citations = 109(Granted Patents)


Company Filing History:


Years Active: 2003-2009

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7 patents (USPTO):Explore Patents

Title: The Innovations of Stephen Hsu

Introduction

Stephen Hsu is a prominent inventor based in Fremont, California. He has made significant contributions to the field of semiconductor technology, holding a total of seven patents. His work focuses on improving lithographic processes, which are crucial for the manufacturing of integrated circuits.

Latest Patents

Among his latest patents is a method and apparatus for decomposing semiconductor device patterns into phase and chrome regions for chromeless phase lithography. This innovative method involves generating a mask used in printing a target pattern on a substrate. The process includes determining the maximum width of features to be imaged, identifying features within the target pattern, and forming phase-structures in the mask. Another notable patent is for improved lithographic patterning utilizing optimized illumination conditions and high transmission attenuated phase-shift masks. This method enhances the optical transfer of lithographic patterns onto semiconductor substrates, ensuring accurate reproduction of intricate designs.

Career Highlights

Stephen Hsu currently works at ASML Masktools B.V., a company known for its advanced lithography equipment. His expertise in semiconductor technology has positioned him as a key player in the industry. His innovative approaches have contributed to the advancement of lithographic techniques, which are essential for modern electronics.

Collaborations

Stephen has collaborated with notable colleagues, including Jang Fung Chen and Thomas Laidig. Their combined efforts have led to significant advancements in the field of semiconductor manufacturing.

Conclusion

Stephen Hsu's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to shape the future of lithographic processes in the electronics industry.

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