Clifton Park, NY, United States of America

Shyam Pal


Average Co-Inventor Count = 6.2

ph-index = 1

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2015-2019

where 'Filed Patents' based on already Granted Patents

4 patents (USPTO):

Title: Innovations of Inventor Shyam Pal

Introduction

Shyam Pal is a notable inventor based in Clifton Park, NY (US). He has made significant contributions to the field of semiconductor devices, holding a total of four patents. His work focuses on advanced methods for fabricating semiconductor devices, showcasing his expertise and innovative spirit.

Latest Patents

Shyam Pal's latest patents include groundbreaking technologies such as "Devices with chamfer-less vias multi-patterning and methods for forming chamfer-less vias." This patent discloses methods for fabricating semiconductor devices with chamfer-less via multi-patterning. One method involves obtaining an intermediate semiconductor device, performing a trench etch to create a trench pattern, depositing an etching stack, conducting via patterning processes, and forming via openings in the semiconductor device. Another significant patent is for "Siloxane and organic-based MOL contact patterning." This patent provides methods for MOL S/D contact patterning of RMG devices without damaging the Rx area or replacing the dielectric. The process includes forming a SOG layer around an RMG structure, patterning openings through the lithography stack, and converting the SOG layer to a SiO layer.

Career Highlights

Shyam Pal is currently employed at GlobalFoundries Inc., a leading semiconductor manufacturer. His work at the company has been instrumental in advancing semiconductor technology and improving manufacturing processes. His innovative approaches have contributed to the development of more efficient and effective semiconductor devices.

Collaborations

Shyam Pal has collaborated with notable coworkers such as Guillaume Bouche and Andy C Wei. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Shyam Pal's contributions to the field of semiconductor devices through his patents and work at GlobalFoundries Inc. highlight his role as an influential inventor. His innovative methods and collaborative efforts continue to shape the future of semiconductor technology.

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