Shuqiang Chen

Title: Innovations of Shuqiang Chen in Optical Characterization

Introduction

Shuqiang Chen is a notable inventor based in Sunnyvale, California. He has made significant contributions to the field of optical characterization, holding a total of six patents. His work focuses on improving the efficiency and accuracy of optical measurements, particularly in relation to 2-D gratings.

Latest Patents

Shuqiang Chen's latest patents include methods and apparatus for efficient characterization of symmetrically illuminated symmetric 2-D gratings. This invention is applicable to gratings that possess a grating reflection symmetry plane. The technology allows for samples to be illuminated at normal incidence or at a non-zero angle, with the plane of incidence being parallel to or identical with the symmetry plane. The diffracted field components can be either symmetric or anti-symmetric concerning the grating symmetry plane. This symmetry is utilized to create a symmetry-reduced 2-D RCWA, which has a reduced matrix dimension, making it mathematically equivalent to a conventional 2-D RCWA. For gratings with two reflection symmetry planes, a normal incidence RCWA is provided, which can be used to characterize samples illuminated at non-normal incidence. The accuracy of this approximation can be enhanced by adjusting the grating depth or refractive index. Additionally, he has developed improved computation methods for Fourier coefficients in modeling 2-D grating diffraction, which involves approximating domains as trapezoids for more efficient calculations.

Career Highlights

Shuqiang Chen is currently employed at N&K Technology, Inc., where he continues to innovate in the field of optical technology. His work has been instrumental in advancing the understanding and application of optical characterization techniques.

Collaborations

Shuqiang has collaborated with notable coworkers, including Guoguang Li and Abdul Rahim Forouhi, contributing to a dynamic research environment that fosters innovation.

Conclusion

Shuqiang Chen's contributions to optical characterization through his patents and collaborative efforts highlight his role as a leading inventor in the field. His work continues to influence advancements in optical technology and measurement techniques.