Shuen-Liang Tseng, based in Hsinchu, Taiwan, is a distinguished inventor with a significant portfolio, holding four patents to his name. His work primarily focuses on the field of magnetic assemblies and their applications in semiconductor manufacturing, contributing to advancements that streamline deposition processes and enhance efficiency in production.

Latest Patents

Among his latest innovations are critical patents that address the manipulation of magnetic fields in deposition chambers. One notable invention is the "Sputter Target Magnet," which outlines a method for modifying the magnetic field distribution within a deposition chamber. This method involves providing a target magnetic field, strategically removing and replacing magnets, and making precise adjustments to the magnets' positions and sizes to achieve optimal magnetic flux. The process culminates in measuring and comparing the magnetic field distribution with predefined targets.

Shuen-Liang's other recent patent involves "Systems and Methods for Uniform Target Erosion Magnetic Assemblies." This invention features a unique magnetic assembly configured to rotate and generate an electromagnetic field that effectively directs ions towards the target region within a defined chamber. This innovation marks a significant stride in ensuring uniformity in target erosion, crucial for high-precision semiconductor applications.

Career Highlights

Shuen-Liang Tseng is currently an integral part of the Taiwan Semiconductor Manufacturing Company (TSMC), a leader in the semiconductor industry known for its cutting-edge manufacturing capabilities. His contributions play a vital role in the continuous pursuit of excellence and efficiency within the competitive landscape of semiconductor manufacturing.

Collaborations

Throughout his career, Tseng has collaborated with notable colleagues such as Chen-Fang Chung and Wen-Cheng Cheng. These partnerships have fostered an environment of innovation and creativity, further propelling advancements in the technologies related to magnetic assemblies and deposition processes.

Conclusion

Shuen-Liang Tseng’s contributions to the field of magnetic technology stand as a testament to his ingenuity and dedication as an inventor. With a focus on enhancing semiconductor manufacturing processes, his patents have the potential to significantly impact the efficiency and effectiveness of production within the industry. As he continues to innovate, the future of magnetic assembly technologies looks promising.

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