Location History:
- Kanagawa-ken, JP (2009)
- Kawasaki, JP (2009 - 2019)
Company Filing History:
Years Active: 2009-2019
Title: Shogo Matsumaru: Innovator in Resist Composition Technology
Introduction
Shogo Matsumaru is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of resist composition technology, holding a total of 12 patents. His work focuses on developing advanced materials that enhance the performance of resist patterns in various applications.
Latest Patents
Matsumaru's latest patents include innovative resist compositions and methods for forming resist patterns. One notable patent describes a resist composition that generates acid upon exposure and exhibits changed solubility in a developing solution under the action of acid. This composition includes a base component that also changes solubility in response to acid and an acid diffusion control agent. The base component features a structural unit represented by a specific general formula, where R can be hydrogen, a C1-C5 alkyl group, or a C1-C5 halogenated alkyl group. The acid diffusion control agent contains an acid with a dissociation constant of 1.5 or more.
Another patent outlines a resist composition that includes a base component exhibiting changed solubility in a developing solution and an acid generator that produces acid upon exposure. The base component consists of a resin with a structural unit represented by a general formula, while the acid generator contains a compound with a cation moiety that has an electron-withdrawing group.
Career Highlights
Throughout his career, Matsumaru has worked with notable companies such as Tokyo Ohka Kogyo Co., Ltd. and Riken Corporation. His experience in these organizations has allowed him to refine his expertise in resist technology and contribute to advancements in the field.
Collaborations
Matsumaru has collaborated with esteemed colleagues, including Hideo Hada and Toshiyuki Ogata. These partnerships have fostered innovation and the exchange of ideas, further enhancing the development of resist compositions.
Conclusion
Shogo Matsumaru is a distinguished inventor whose work in resist composition technology has led to significant advancements in the field. His innovative patents and collaborations with industry leaders underscore his impact on the industry.