The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
Feb. 04, 2009
Applicants:
Hideo Hada, Kawasaki, JP;
Masaru Takeshita, Kawasaki, JP;
Shogo Matsumaru, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Inventors:
Hideo Hada, Kawasaki, JP;
Masaru Takeshita, Kawasaki, JP;
Shogo Matsumaru, Kawasaki, JP;
Hiroaki Shimizu, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/028 (2006.01); C08F 2/38 (2006.01);
U.S. Cl.
CPC ...
Abstract
A resin for photoresist compositions is disclosed with excellent resolution and line edge roughness characteristics. A photoresist composition and a method for forming a resist pattern using such a resin are also disclosed. The resin has a hydroxyl group bonded to a carbon atom at a polymer terminal, and the carbon atom in the α-position to the hydroxyl group has at least one electron attractive group.