logo

For the Inventor, By the Inventor

Miyagi, Japan

Sho Oikawa

This inventor holds 4 USPTO granted patents and 4 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2021-2023.

USPTO Granted Patents = 4 

% Patents Active = 100.0

Average Co-Inventor Count = 3.3

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:

goldMedal4 out of 10,862 
 
Tokyo Electron Limited
 patents

Years Active: 2021-2023

Loading Chart...
4 patents (USPTO):Explore Patents
1. 11721595 - Processing method and plasma processing apparatus (2023-08-08),
2. 11610766 - Target object processing method and plasma processing apparatus (2023-03-21),
3. 11328934 - Etching method and substrate processing apparatus (2022-05-10),
4. 11211229 - Processing method and plasma processing apparatus (2021-12-28),
Profile summary based on public USPTO records.
Please report any incorrect information to [email protected]
Loading…