Average Co-Inventor Count = 3.7

ph-index = 8

Forward Citations = 234(Granted Patents)

Location History:

Kanagawa, JP (2011 - 2014)
Hiratsuka, JP (2001 - 2020)
Tochigi, JP (2016 - 2020)
Oyama, JP (2018 - 2024)

Company Filing History:

Kabushiki Kaisha Topcon

where one patent can have more than one assignee

Years Active: 2001-2024

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45 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11940736 - Tin trap device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method (2024-03-26),

2. 11272608 - Extreme ultraviolet light generation apparatus and electronic device manufacturing method (2022-03-08),

3. 11042102 - Extreme ultraviolet light generation device and electronic device manufacturing method (2021-06-22),

4. 10820400 - Extreme ultraviolet light generation apparatus (2020-10-27),

5. 10764986 - Extreme ultraviolet light generation apparatus (2020-09-01),

6. 10314152 - Extreme ultraviolet light generation apparatus (2019-06-04),

7. 10268119 - Extreme ultraviolet light generating device (2019-04-23),

8. 10136510 - Extreme ultraviolet light generation device (2018-11-20),

9. 10001706 - Extreme ultraviolet light generation apparatus and method of designing the same (2018-06-19),

10. 9872372 - Extreme ultraviolet light generation device (2018-01-16),

11. 9510433 - Extreme ultraviolet light generation apparatus (2016-11-29),

12. 9465307 - Cleaning method for EUV light generation apparatus (2016-10-11),

13. 8902948 - Polarization purity control device and gas laser apparatus provided with the same (2014-12-02),

14. 8901524 - Extreme ultraviolet light source apparatus (2014-12-02),

15. 8901522 - Chamber apparatus and extreme ultraviolet light generation system (2014-12-02),

Title: Shinji Nagai: Pioneering Innovations in Extreme Ultraviolet Light Generation

Introduction:

Shinji Nagai, a remarkable inventor hailing from Hiratsuka, JP, has made significant contributions to the field of extreme ultraviolet light generation. With an impressive portfolio of 45 patents, Nagai's inventive spirit and dedication to pushing the boundaries of technology are truly commendable.

Latest Patents:

Among his latest patents is the Tin Trap Device, designed to collect tin in a chamber device by utilizing laser light to turn tin into plasma. This innovative device features a main heater with a temperature exceeding the melting point of tin, contributing to efficient tin collection. Nagai's Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method showcase his expertise in developing cutting-edge technologies for plasma generation, light concentration, and gas supply in electronic device manufacturing processes.

Career Highlights:

Having worked at esteemed companies such as Gigaphoton Inc. and Komatsu Corporation, Nagai has honed his skills and expertise in the field of advanced technology development. His relentless pursuit of innovation and excellence has led to the creation of groundbreaking solutions for the semiconductor industry and beyond.

Collaborations:

Throughout his career, Nagai has collaborated with exceptional individuals such as Osamu Wakabayashi and Kouji Kakizaki. These collaborative efforts have resulted in the successful implementation of novel ideas and the realization of revolutionary technologies in extreme ultraviolet light generation and electronic device manufacturing.

Conclusion:

Shinji Nagai's inventive prowess and unwavering dedication to technological advancement have cemented his legacy as a trailblazer in the field of extreme ultraviolet light generation. His numerous patents and collaborative efforts stand as a testament to his innovative spirit and relentless drive to push the boundaries of what is possible in the world of electronic device manufacturing.

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