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Gigaphoton Inc.

USPTO Granted Patents = 565

EPO Patents = 12

Trademarks = 6

Forward Citations = 1,121

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209 inventors (with patents filed for the assignee):

Osamu Wakabayashi (247 out of 294 patents)

Kouji Kakizaki (70 out of 72 patents)

Masato Moriya (51 out of 72 patents)

4. Takayuki Yabu (45 out of 53 patents)

5. Tamotsu Abe (43 out of 46 patents)

6. Shinji Nagai (40 out of 45 patents)

7. Hideo Hoshino (39 out of 40 patents)

8. Yoshifumi Ueno (38 out of 48 patents)

9. Tatsuya Yanagida (38 out of 38 patents)

10. Akira Endo (33 out of 116 patents)

11. Tsukasa Hori (32 out of 38 patents)

12. Hakaru Mizoguchi (32 out of 49 patents)

13. Takashi Suganuma (31 out of 33 patents)

14. Hiroaki Tsushima (26 out of 26 patents)

15. Toshihiro Nishisaka (24 out of 29 patents)

Core Competencies:

EUV Light Generation

Laser Processing

Electronic Device Manufacturing

Gas Laser Apparatus

Wavelength Control

Target Supply System

Laser Control Method

Extreme Ultraviolet Light

Line Narrowing Device

Laser Annealing

Pulse Width Expansion

Inspection Method

565 patents: Sort by Forward Citations

1. 12513808 - Extreme ultraviolet light generation apparatus and electronic device manufacturing method (2025-12-30),

2. 12512641 - Extreme ultraviolet light generation apparatus and electronic device manufacturing method (2025-12-30),

3. 12512640 - Laser system, pulse laser light generating method, and electronic device manufacturing method (2025-12-30),

4. 12504694 - Extreme ultraviolet light generation chamber device and electronic device manufacturing method (2025-12-23),

5. 12494616 - Control method of discharge-excitation type laser device, discharge-excitation type laser device, and electronic device manufacturing method (2025-12-09),

6. 12455231 - EUV light generation apparatus, electronic device manufacturing method, and inspection method (2025-10-28),

7. 12439503 - Target supply device and electronic device manufacturing method (2025-10-07),

8. 12438333 - Line narrowing gas laser device, wavelength control method, and electronic device manufacturing method (2025-10-07),

9. 12438327 - Bypass apparatus, laser apparatus, and electronic device manufacturing method (2025-10-07),

10. 12432839 - Extreme ultraviolet light generation chamber device and electronic device manufacturing method (2025-09-30),

11. 12424813 - Laser device, laser control method, and electronic device manufacturing method (2025-09-23),

12. 12406889 - Electronic device manufacturing method (2025-09-02),

13. 12401171 - Laser device, laser oscillation method, and electronic device manufacturing method (2025-08-26),

14. 12389508 - Light source parameter information management method, light source parameter information management apparatus, and computer readable medium (2025-08-12),

15. 12388228 - Laser device and leak check method for laser device (2025-08-12),

Gigaphoton Inc. is a leading manufacturer of laser-based lithography light sources used in the semiconductor industry. With a strong focus on innovation and technological advancements, Gigaphoton offers a wide range of high-quality products and solutions that enable customers to achieve higher productivity in their semiconductor manufacturing processes. Headquartered in Japan, Gigaphoton has established a global presence, serving semiconductor manufacturers worldwide with their cutting-edge laser technologies and exceptional customer support.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

565 Patents

#1 in Tochigi

#340 in Japan

#1,671 in the World

Gigaphoton Inc.

Forward Citations = 1,121

209 inventors:

Osamu Wakabayashi (247 out of 294 patents)

Kouji Kakizaki (70 out of 72 patents)

Masato Moriya (51 out of 72 patents)

4. Takayuki Yabu (45 out of 53 patents)

5. Tamotsu Abe (43 out of 46 patents)

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