The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2026
Filed:
Dec. 11, 2024
Gigaphoton Inc., Tochigi, JP;
Atsushi Ueda, Oyama, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
An extreme ultraviolet light generation apparatus includes a chamber including a first space and a second space; a first partition wall including a first opening through which extreme ultraviolet light passes; a connection portion connecting the chamber and an external apparatus; a second partition wall including a second opening through which the extreme ultraviolet light passes; a gas supply port which allows a gas to pass therethrough; a first exhaust port which opens to the first space; a second exhaust port which opens to a third space located inside the connection portion; a first sensor arranged in the third space; and a processor calculating a first passage flow rate of a gas passing through the first opening based on a measurement result of the first sensor and adjusting a supply flow rate of the gas to be supplied through the gas supply port based on the first passage flow rate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile