Enter inventor name

Average Co-Inventor Count = 3.5

ph-index = 19

Forward Citations = 2,622(Granted Patents)

Location History:

Hachioji, JP (1983 - 1985)
Sayama-shi, JP (1994)
Sayama, JP (1989 - 2006)

Company Filing History:

Renesas Technology Corp.

patents

4. 1 out of 832,876

Other

patents

where one patent can have more than one assignee

Years Active: 1983-2006

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Areas of Expertise:

Dry Etching

Plasma Processing

Semiconductor Manufacturing

Chemical-Mechanical Polishing

Plasma Treatment

Vacuum Environment

Surface Treatment

Silicon Nitride Etching

Semiconductor Device Production

Etching Apparatus

Wafer Cleaning

Memory Device Isolation

46 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7071114 - Method and apparatus for dry etching (2006-07-04),

2. 6927173 - Plasma processing method (2005-08-09),

3. 6902683 - Plasma processing apparatus and plasma processing method (2005-06-07),

4. 6842658 - Method of manufacturing a semiconductor device and manufacturing system (2005-01-11),

5. 6713401 - Method for manufacturing semiconductor device (2004-03-30),

6. 6643893 - Apparatus for cleaning semiconductor wafers in a vacuum environment (2003-11-11),

7. 6629538 - Method for cleaning semiconductor wafers in a vacuum environment (2003-10-07),

8. 6579154 - Dry chemical-mechanical polishing method (2003-06-17),

9. 6573190 - Dry etching device and dry etching method (2003-06-03),

10. 6562722 - Method and apparatus for dry etching (2003-05-13),

11. 6551445 - Plasma processing system and method for manufacturing a semiconductor device by using the same (2003-04-22),

12. 6511608 - Plasma processing method (2003-01-28),

13. 6506687 - Dry etching device and method of producing semiconductor devices (2003-01-14),

14. 6475918 - Plasma treatment apparatus and plasma treatment method (2002-11-05),

15. 6333273 - Method and apparatus for dry etching (2001-12-25),

Title: The Innovative Journey of Inventor Shinichi Tachi

Introduction: Shinichi Tachi is a renowned inventor hailing from Sayama, Japan, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Shinichi Tachi holds several patents in the areas of robotics, artificial intelligence, and human-machine interactions, showcasing his continuous dedication to pushing the boundaries of technological advancements.

Career Highlights: With a career spanning over two decades, Shinichi Tachi has worked tirelessly to develop cutting-edge technologies that have revolutionized various industries. His work has been instrumental in shaping the future of robotics and automation.

Collaborations: Throughout his career, Shinichi Tachi has collaborated with leading research institutions, universities, and tech companies to further his research and bring his innovative ideas to life. His collaborative efforts have led to the development of groundbreaking technologies that have had a lasting impact on society.

Conclusion: Shinichi Tachi's passion for innovation and his relentless pursuit of excellence have solidified his position as a trailblazer in the world of technology. His work continues to inspire future generations of inventors and researchers to push the boundaries of what is possible in the realm of technology and innovation.

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