Shingo Okubo

Title: Shingo Okubo: Innovator in Vapor Deposition Technologies

Introduction

Shingo Okubo is a prominent inventor based in Tsukuba, Japan. He has made significant contributions to the field of vapor deposition technologies, holding a total of 8 patents. His work focuses on innovative supply systems and methods for depositing silicon-containing films.

Latest Patents

One of Okubo's latest patents is a supply system for low volatility precursors. This system includes a first vessel containing the precursor, a second vessel, and a first gas conduit fluidically connecting the two vessels. It features a pressure reduction device and a flow control device, along with a second gas conduit that connects the second vessel to a point of use. A pressure gauge downstream of the pressure reduction device measures the partial pressure of the precursor in the second vessel, ensuring it is at a pressure lower than the saturated vapor pressure of the precursor at the temperature of the second vessel. Additionally, the partial pressure is maintained higher than the inlet pressure requirement of the flow control device at the point of use. Methods for using this supply system are also disclosed.

Another notable patent involves the vapor deposition of silicon-containing films using penta-substituted disilanes. This patent outlines methods for depositing silicon-containing films on substrates via vapor deposition processes utilizing compounds such as pentahalodisilane or pentakis(dimethylamino)disilane.

Career Highlights

Throughout his career, Shingo Okubo has worked with notable companies, including Air Liquide Société Anonyme Pour L'étude Et L'exploitation Des Procédés Georges Claude. His experience in these organizations has contributed to his expertise in the field of vapor deposition technologies.

Collaborations

Okubo has collaborated with several professionals in his field, including Kazutaka Yanagita and Julien Gatineau. These collaborations have further enhanced his innovative work and contributions to the industry.

Conclusion

Shingo Okubo is a distinguished inventor whose work in vapor deposition technologies has led to significant advancements in the field. His innovative patents and collaborations reflect his commitment to pushing the boundaries of technology.