Shingo Narimatsu

Title: Innovations of Shingo Narimatsu in Semiconductor Technology

Introduction

Shingo Narimatsu is a prominent inventor based in Niigata, Japan, known for his significant contributions to semiconductor technology. With a total of four patents to his name, Narimatsu has developed innovative methods that enhance the manufacturing processes of semiconductor materials.

Latest Patents

One of his latest patents is a manufacturing method for semiconductor silicon wafers. This method involves doping the substrate with phosphorus (P) to achieve a resistivity of 1.05 mΩ·cm or less. It also includes the formation of defects in the crystal structure due to the aggregation of P, specifically Si—P crystal defects. The process entails creating a silicon oxide film on the backside of the substrate, which must be between 300 nm and 700 nm thick, followed by a mirror-polishing step. After polishing, a heat treatment is performed on the substrate, which is mounted on a holder made of silicon or silicon carbide, where a silicon oxide film of 200 nm to 500 nm thickness is also formed. The relationship between the thickness of the films is defined by the equation Y=C−X, where C is a constant ranging from 800 to 1000.

Another notable patent is a method and apparatus for pulling single crystals. This innovation allows for the efficient addition of dopants into the silicon melt without generating dislocations, resulting in single crystals with low resistivity. The method utilizes an inert gas flow that moves from above the silicon melt, facilitating the gasification of dopants and their introduction into the heat shield surrounding the growing silicon crystal.

Career Highlights

Shingo Narimatsu is currently employed at GlobalWafers Japan Co., Ltd., where he continues to advance semiconductor manufacturing techniques. His work has been instrumental in improving the quality and efficiency of silicon wafer production.

Collaborations

Narimatsu collaborates with notable colleagues, including Takeshi Senda and Hironori Banba, who contribute to his innovative projects and research endeavors.

Conclusion

Shingo Narimatsu's contributions to semiconductor technology through his patents and collaborative efforts highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor manufacturing processes.