The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 20, 2015
Filed:
Sep. 14, 2011
Hironori Banba, Niigata, JP;
Hiromichi Isogai, Niigata, JP;
Yoshiaki Abe, Niigata, JP;
Takashi Ishikawa, Niigata, JP;
Shingo Narimatsu, Niigata, JP;
Jun Nakao, Niigata, JP;
Hiroyuki Abiko, Niigata, JP;
Michihiro Ohwa, Niigata, JP;
Hironori Banba, Niigata, JP;
Hiromichi Isogai, Niigata, JP;
Yoshiaki Abe, Niigata, JP;
Takashi Ishikawa, Niigata, JP;
Shingo Narimatsu, Niigata, JP;
Jun Nakao, Niigata, JP;
Hiroyuki Abiko, Niigata, JP;
Michihiro Ohwa, Niigata, JP;
Globalwafers Japan Co., Ltd, Niigata, JP;
Abstract
According to one exemplary embodiment, a single crystal pulling-up apparatus of pulling-up silicon single crystals by a Czochralski method, is provided with: a neck diameter measuring portion which measures a diameter of a grown neck portion; a first compensation portion which outputs a first compensated pulling-up speed for the seed crystals based on a difference between a measured value of the diameter of the neck portion and a target value of the neck portion diameter previously stored; a second compensation portion which outputs a second pulling-up speed while limiting an upper limit of the first pulling-up speed to a first limit value; and a crucible rotation number compensation portion which lowers the number of a rotation of a crucible at least in a period where the upper limit of the first pulling-up speed is limited to the first limit value.