Company Filing History:
Years Active: 2006-2013
Title: Shing-Ann Luo: Innovator in Plasma Process Technology
Introduction
Shing-Ann Luo is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of plasma process technology, holding a total of 7 patents. His work focuses on advanced process control systems that enhance the efficiency and effectiveness of plasma processes.
Latest Patents
Among his latest patents, Luo has developed a method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) process. This innovative approach includes an advanced process control (APC) system for a plasma process machine, which features an optical emission spectroscopy (OES) system for monitoring testing objects. Additionally, he has patented a method of depositing a silicon-containing material using a multi-step fill-in process in a deposition machine, further showcasing his expertise in this area.
Career Highlights
Shing-Ann Luo is currently employed at Macronix International Co., Ltd., where he continues to push the boundaries of plasma technology. His work has not only advanced the field but has also contributed to the company's reputation as a leader in semiconductor manufacturing.
Collaborations
Luo has collaborated with notable colleagues, including Chin-Ta Su and Tuung Luoh, to further enhance the research and development efforts within his organization.
Conclusion
Shing-Ann Luo's innovative contributions to plasma process technology and his impressive portfolio of patents underscore his role as a key figure in the industry. His work continues to influence advancements in semiconductor manufacturing and process control systems.