This inventor holds 18 USPTO granted patents and 4 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2018-2025.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Hsin-Chu, TW (2018 - 2023)
- Kaohsiung, TW (2018 - 2023)
Company Filing History:
Years Active: 2018-2025
Title: Shih-Wei Hung: Innovator in Semiconductor Technology
Introduction
Shih-Wei Hung is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 18 patents. His innovative work focuses on enhancing the capabilities of semiconductor metrology tools and specimen preparation techniques.
Latest Patents
One of Shih-Wei Hung's latest patents is related to atom probe tomography specimen preparation. This patent discloses techniques for preparing an atom probe tomography (APT) specimen directly on a device under test (DUT) region on a wafer. The APT specimen is formed integrally with the substrate, utilizing laser patterning to create a trench and bump structures. Following this, low-kV gas ion milling is employed to shape the bump structures into the APT specimen.
Another notable patent involves detection systems in semiconductor metrology tools. This invention includes a particle generation system designed to analyze samples by removing particles. The system features a local electrode that produces an attractive electric field, directing the removed particles towards an aperture. Additionally, a particle capture device generates a repulsive electric field to further guide the particles, while a position detector determines their coordinates and flight time. The processor then identifies the particles based on this data.
Career Highlights
Shih-Wei Hung is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has significantly advanced the field, particularly in the areas of specimen preparation and particle detection.
Collaborations
Shih-Wei Hung collaborates with several talented individuals, including Chien-Feng Lin and Jang Jung Lee, who contribute to his innovative projects.
Conclusion
Shih-Wei Hung's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor metrology and specimen preparation techniques.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile