Location History:
- Hsin-Chu, TW (2018 - 2023)
- Kaohsiung, TW (2018 - 2023)
Company Filing History:
Years Active: 2018-2025
Title: Shih-Wei Hung: Innovator in Semiconductor Technology
Introduction
Shih-Wei Hung is a prominent inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 18 patents. His innovative work focuses on enhancing the capabilities of semiconductor metrology tools and specimen preparation techniques.
Latest Patents
One of Shih-Wei Hung's latest patents is related to atom probe tomography specimen preparation. This patent discloses techniques for preparing an atom probe tomography (APT) specimen directly on a device under test (DUT) region on a wafer. The APT specimen is formed integrally with the substrate, utilizing laser patterning to create a trench and bump structures. Following this, low-kV gas ion milling is employed to shape the bump structures into the APT specimen.
Another notable patent involves detection systems in semiconductor metrology tools. This invention includes a particle generation system designed to analyze samples by removing particles. The system features a local electrode that produces an attractive electric field, directing the removed particles towards an aperture. Additionally, a particle capture device generates a repulsive electric field to further guide the particles, while a position detector determines their coordinates and flight time. The processor then identifies the particles based on this data.
Career Highlights
Shih-Wei Hung is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has significantly advanced the field, particularly in the areas of specimen preparation and particle detection.
Collaborations
Shih-Wei Hung collaborates with several talented individuals, including Chien-Feng Lin and Jang Jung Lee, who contribute to his innovative projects.
Conclusion
Shih-Wei Hung's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in semiconductor metrology and specimen preparation techniques.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.