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Shigeyuki Uzawa

USPTO Granted Patents = 30

EPO Patents = 1

Average Co-Inventor Count = 1.9

ph-index = 13

Forward Citations = 412(Granted Patents)

Location History:

Nakamachi, JP (1998 - 2002)
Tokyo, JP (1996 - 2007)
Utsunomiya, JP (1996 - 2011)

Company Filing History:

30 out of 90,753

Canon Kabushiki Kaisha

Years Active: 1996-2011

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30 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7948695 - Optical element positioning apparatus, projection optical system and exposure apparatus (2011-05-24),

2. 7821726 - Optical element positioning apparatus, projection optical system and exposure apparatus (2010-10-26),

3. 7525106 - Exposure apparatus, pressure control method for the same, and device manufacturing method (2009-04-28),

4. 7166855 - Surface position detecting system and method (2007-01-23),

5. 6963075 - Scanning exposure apparatus and device manufacturing method (2005-11-08),

6. 6864953 - Exposure apparatus, device manufacturing method, semiconductor manufacturing plant and method of maintaining exposure apparatus (2005-03-08),

7. 6614503 - Projection exposure apparatus, and device manufacturing method which compensate for a change in optical performance of a projection optical system (2003-09-02),

8. 6559465 - Surface position detecting method having a detection timing determination (2003-05-06),

9. 6534777 - Surface position detecting system and method having a sensor selection (2003-03-18),

10. 6531706 - Surface position detecting system and method having an optimum value (2003-03-11),

11. 6493062 - Driving apparatus and exposure apparatus (2002-12-10),

12. 6473158 - Exposure method and exposure apparatus (2002-10-29),

13. 6359688 - Projection exposure apparatus and method of controlling same (2002-03-19),

14. 6342942 - Exposure apparatus, exposure control method, and device fabrication method using the exposure apparatus (2002-01-29),

15. 6342703 - Exposure apparatus, exposure method, and device manufacturing method employing the exposure method (2002-01-29),

Title: Shigeyuki Uzawa: Pioneering Inventor from Tokyo

Introduction: Shigeyuki Uzawa is a renowned inventor hailing from Tokyo, Japan, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Shigeyuki Uzawa holds several patents in the areas of robotics, artificial intelligence, and renewable energy, showcasing his continuous commitment to pushing the boundaries of technological advancement.

Career Highlights: With a career spanning over three decades, Uzawa has worked with leading tech companies in Japan, spearheading research and development projects that have led to significant technological breakthroughs.

Collaborations: Throughout his career, Shigeyuki Uzawa has collaborated with top researchers, engineers, and scientists both in Japan and internationally, fostering a culture of innovation and knowledge sharing.

Conclusion: Shigeyuki Uzawa's relentless pursuit of innovation and his passion for creating technology that makes a difference have solidified his reputation as a visionary inventor in the global tech community.

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