The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2003
Filed:
Feb. 27, 2001
Yuichi Yamada, Utsunomiya, JP;
Shigeyuki Uzawa, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A surface position detecting system for detecting a surface position of a substrate. The system includes a plurality of sensors for measuring surface position at plural locations on the substrate, while relatively scanning the substrate, a discriminating device for discriminating and memorizing, beforehand, effectiveness/ineffectiveness of each sensor at each measurement point during scanning measurement, on the basis of information related to the substrate processing, and a calculating device for selecting, during scan measurement, one or those of the sensors of effective measured value on the basis of the discrimination information and for calculating the surface information of the substrate on the basis of a measurement output of the one or those sensors.