Shigeto Tsuruta is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of bonding systems and inspection methods, holding a total of 5 patents. His work focuses on enhancing the efficiency and accuracy of combined substrate inspections.

Latest Patents

One of Tsuruta's latest patents is a bonding system and inspection method for inspecting combined substrates. This innovative bonding system includes a bonding device, an inspection device, and a controller. The bonding device is responsible for forming a combined substrate by bonding a first substrate and a second substrate together. The inspection device then inspects the combined substrate, while the controller manages the inspection process. The controller features a measurement controller, a comparison unit, and a re-measurement controller. The measurement controller directs the inspection device to measure the combined substrate at a specified number of measurement points. The comparison unit evaluates the inspection results, including any deviation between the two substrates. If necessary, the re-measurement controller instructs the inspection device to conduct further measurements at additional points.

Another significant patent involves a measuring method and device. This method includes measuring a displacement and positioning an imaging unit to capture an image of a measurement mark. The imaging unit focuses on the measurement mark while adjusting its focal position based on the measured displacement. This innovative approach allows for precise position deviation measurements within the combined substrate.

Career Highlights

Shigeto Tsuruta is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His work at the company has allowed him to develop and refine his innovative ideas, contributing to advancements in technology.

Collaborations

Tsuruta has collaborated with several talented individuals in his field, including Yuji Mimura and Eiji Manabe. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Shigeto Tsuruta is a distinguished inventor whose work in bonding systems and inspection methods has made a significant impact in the field. His innovative patents and collaborations with other professionals highlight his commitment to advancing technology.

Profile summary based on public USPTO records.

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