The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 17, 2023
Filed:
Apr. 10, 2019
Tokyo Electron Limited, Tokyo, JP;
Yuji Mimura, Koshi, JP;
Shigeto Tsuruta, Koshi, JP;
Eiji Manabe, Koshi, JP;
Hisanori Hizume, Sapporo, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A measuring method includes measuring a displacement A, placing an imaging unitat a position where the imaging unit is allowed to image a measurement mark MI and imaging the measurement mark M. In the measuring of the displacement A, the displacement Aof a surface of a combined substrate, which is composed of two sheets of substrates bonded to each other, on a side of the imaging unitat a position where the measurement mark Mfor position deviation measurement, which is provided within the combined substrate, is placed is measured. In the imaging of the measurement mark M, the measurement mark Mis imaged by the imaging unitwhile putting the measurement mark Min focus by moving a focal position back and forth with respect to a focal position which is previously set based on the displacement A