Shigeru Serikawa

Title: Shigeru Serikawa: Innovator in Optical Inspection Technologies

Introduction

Shigeru Serikawa is a prominent inventor based in Chigasaki, Japan. He has made significant contributions to the field of optical inspection, holding a total of 9 patents. His work focuses on developing methods and apparatuses that enhance the detection of defects in various substrates.

Latest Patents

Among his latest patents is an innovative optical inspection method and its apparatus. This invention provides a technique capable of detecting finer defects on the surface of a substrate. The method involves irradiating a rotating sample surface with illumination light at an oblique angle. It also includes detecting images of light formed by forward scattering while excluding regular-reflection light. Additionally, it condenses and detects lateral scattering light to extract defects, including scratches. Another notable patent is a method for defect determination in fine concave-convex patterns. This method involves detecting a spectral waveform of an inspection area, performing area determination based on the pattern type, and comparing calculated feature values to determine defect types.

Career Highlights

Shigeru Serikawa has worked with notable companies such as Hitachi High-Technologies Corporation and Hitachi Electronics Engineering Co., Ltd. His experience in these organizations has contributed to his expertise in optical inspection technologies.

Collaborations

Throughout his career, Shigeru has collaborated with talented individuals, including Minoru Yoshida and Hideaki Sasazawa. These collaborations have likely enriched his work and led to further advancements in his field.

Conclusion

Shigeru Serikawa's contributions to optical inspection technologies demonstrate his innovative spirit and dedication to improving defect detection methods. His patents reflect a commitment to advancing technology in this critical area.