The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2012
Filed:
Jan. 27, 2010
Tatsuo Hariyama, Fujisawa, JP;
Hideaki Sasazawa, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Shigeru Serikawa, Chigasaki, JP;
Tatsuo Hariyama, Fujisawa, JP;
Hideaki Sasazawa, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Shigeru Serikawa, Chigasaki, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
The invention has a function of preparing a data base for a relation between a defect shape and an arrangement for the optical system capable of detecting the shape at high sensitivity and automatically adjusting the arrangement for the optical system. As the method of preparing the data base, a method of using optical simulation or an experimental method of using a sample having an optical shape is applied. A pinhole position and a beam size are adjusted automatically so as to attain the optimal arrangement for the optical system to an inputted defect shape based on the data base.