This inventor holds 5 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2003-2015.
Location History:
- Yamanashi, JP (2003)
- Nirasaki, JP (2004 - 2015)
Company Filing History:
Years Active: 2003-2015
Title: Shigeru Kawamura: Innovator in Substrate Processing Technologies
Introduction
Shigeru Kawamura is a notable inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing, holding a total of 5 patents. His work focuses on developing advanced technologies that enhance the efficiency and effectiveness of substrate cleaning and processing.
Latest Patents
Kawamura's latest patents include a substrate cleaning apparatus, a substrate cleaning method, and a substrate processing apparatus. The substrate cleaning apparatus is designed to clean the entire periphery of a substrate end portion simultaneously, utilizing simple control mechanisms without the need for polishing or plasma generation. This innovative apparatus features a mounting table for placing a wafer, a heating unit for heating the wafer's end portion, an ultraviolet application unit for applying ultraviolet light, and a gas flow forming unit to create a gas flow on the wafer's surface.
The substrate processing method and apparatus aim to treat substrates with a composite of inorganic silicon oxide and organic carbon-fluorine materials. The method involves an ultraviolet ray treatment step to remove part of the organic material, followed by a hydrogen fluoride processing step to eliminate some inorganic material. Finally, a heating processing step is conducted to shrink any remaining organic material.
Career Highlights
Shigeru Kawamura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work at the company has allowed him to develop and refine his innovative technologies, contributing to advancements in substrate processing.
Collaborations
Kawamura has collaborated with notable coworkers, including Teruyuki Hayashi and Nobuo Konishi. Their combined expertise has fostered a productive environment for innovation and development in substrate processing technologies.
Conclusion
Shigeru Kawamura's contributions to substrate processing technologies have positioned him as a key figure in the field. His innovative patents and collaborative efforts continue to drive advancements in the industry.