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Nirasaki, Japan

Shigeru Kawamura

USPTO Granted Patents = 5

Average Co-Inventor Count = 2.0

ph-index = 2

Forward Citations = 31(Granted Patents)

Location History:

Yamanashi, JP (2003)
Nirasaki, JP (2004 - 2015)

Company Filing History:

5 out of 10,295

Tokyo Electron Limited

Years Active: 2003-2015

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5 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 8945412 - Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatus (2015-02-03),

2. 8647440 - Substrate processing method and substrate processing apparatus (2014-02-11),

3. 7923680 - Analysis method and analysis apparatus (2011-04-12),

4. 6800546 - Film forming method by radiating a plasma on a surface of a low dielectric constant film (2004-10-05),

5. 6528108 - Method and apparatus for observing porous amorphous film, and method and apparatus for forming the same (2003-03-04),

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