Location History:
- Sagamihara, JP (2010)
- Nirasaki, JP (2011)
- Tsukui-gun, JP (2013)
Company Filing History:
Years Active: 2010-2013
Title: **Innovations by Shigeo Ashigaki: A Pioneer in Semiconductor Device Manufacturing**
Introduction
Shigeo Ashigaki is a notable inventor based in Tsukui-gun, Japan. With a prolific portfolio of three patents, Ashigaki has made significant contributions to the field of semiconductor manufacturing through his innovative techniques and methodologies.
Latest Patents
Among his recent patents, Ashigaki has developed a **Plasma Process Device and Plasma Process Method**. This invention features an electrode plate whose surface opposite to the susceptor possesses a specific projection shape. The design ensures that the thickness of the projection is approximately equal to that of the shield ring, thereby creating a uniform plane between the electrode plate and shield ring. Notably, the major surface of this projection has a diameter 1.2 to 1.5 times that of a standard wafer.
His other significant patent is the **Method for Manufacturing Semiconductor Devices**. This method encompasses the creation of devices from a layered structure that includes a semiconductor substrate and a high dielectric film. A SiC-based film, which functions as both an anti-reflective layer and a hardmask, is then introduced above the high dielectric film. This process includes a plasma-processing step designed to modify both films and a subsequent wet-cleaning step aimed at collectively removing these layers.
Career Highlights
Shigeo Ashigaki is associated with Tokyo Electron Limited, a leading company in semiconductor production equipment. His work involves pioneering advancements that enhance the efficiency and efficacy of semiconductor manufacturing processes. With his expertise and dedication, Ashigaki continues to push the boundaries of innovation in this critical technology sector.
Collaborations
Throughout his career, Ashigaki has collaborated with esteemed colleagues such as Genji Nakamura and Hideaki Yamasaki. Together, they have pursued groundbreaking projects that aim to elevate the standards within the semiconductor industry and beyond.
Conclusion
Shigeo Ashigaki’s contributions to semiconductor device manufacturing underscore the critical role of innovation in technology. With his continued work at Tokyo Electron Limited, Ashigaki remains a vital player in advancing the frontiers of semiconductor technologies, significantly influencing the industry and inspiring future inventions.