The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Jan. 23, 2007
Koichi Takatsuki, Nirasaki, JP;
Hikaru Yoshitaka, Tsukui-gun, JP;
Shigeo Ashigaki, Tsukui-gun, JP;
Yoichi Inoue, Minato-ku, JP;
Takashi Akahori, Tsukui-gun, JP;
Shuuichi Ishizuka, Nirasaki, JP;
Syoichi Abe, Tsukui-gun, JP;
Takashi Suzuki, Nirasaki, JP;
Kohei Kawamura, Nirasaki, JP;
Hidenori Miyoshi, Nirasaki, JP;
Gishi Chung, Nirasaki, JP;
Yasuhiro Oshima, Nirasaki, JP;
Hiroyuki Takahashi, Nirasaki, JP;
Koichi Takatsuki, Nirasaki, JP;
Hikaru Yoshitaka, Tsukui-gun, JP;
Shigeo Ashigaki, Tsukui-gun, JP;
Yoichi Inoue, Minato-ku, JP;
Takashi Akahori, Tsukui-gun, JP;
Shuuichi Ishizuka, Nirasaki, JP;
Syoichi Abe, Tsukui-gun, JP;
Takashi Suzuki, Nirasaki, JP;
Kohei Kawamura, Nirasaki, JP;
Hidenori Miyoshi, Nirasaki, JP;
Gishi Chung, Nirasaki, JP;
Yasuhiro Oshima, Nirasaki, JP;
Hiroyuki Takahashi, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
That surface of an electrode platewhich is opposite to a susceptorhas a projection shape. The electrode plateis fitted in an openingof shield ringat a projection. At this time, the thickness of the projectionis approximately the same as the thickness of the shield ringAccordingly, the electrode plateand the shield ringform substantially the same plane. The major surface of the projectionhas a diameter 1.2 to 1.5 times the diameter of a wafer W. The electrode plateis formed of, for example, SiC.