This inventor holds 3 USPTO granted patents. Top assignee: Intel Corporation. Active years: 1979-1982.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Sunnyvale, CA (US) (1979)
- Los Altos, CA (US) (1982)
Company Filing History:
Years Active: 1979-1982
Title: Sheau-Ming S Liu: Innovator in Semiconductor Technology
Introduction
Sheau-Ming S Liu is a prominent inventor based in Los Altos, California. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of Liu's latest patents is titled "Process for forming opening having tapered sides in a plasma nitride." This patent describes a method for creating a plasma nitride (SiNy) layer with a tapered opening, which facilitates the reception of ohmic contacts. The process involves using a higher ratio of silane to ammonia to create a silicon-rich upper portion of the layer. During the etching process, this silicon-rich portion etches more quickly, resulting in the desired tapered opening.
Another notable patent is "Process for forming metal plated regions and lines in MOS circuits." This invention outlines a method for creating self-aligned, metal-plated substrate regions and polysilicon members. The process includes forming oxide lips along the sides of polysilicon members and utilizing an oxide damaging ion bombardment to protect these lips during etching. A tungsten deposition is then used to create metal plating over the exposed regions, ensuring that no metal is deposited on the oxide lips.
Career Highlights
Sheau-Ming S Liu is currently employed at Intel Corporation, a leading company in semiconductor manufacturing. His innovative work has contributed to advancements in the industry, particularly in the development of processes that improve the performance of MOS circuits.
Collaborations
Liu has collaborated with notable colleagues, including William H Owen, III and Richard D Pashley. Their combined expertise has furthered the research and development efforts within their field.
Conclusion
Sheau-Ming S Liu is a distinguished inventor whose contributions to semiconductor technology have had a lasting impact. His innovative patents and work at Intel Corporation exemplify his commitment to advancing the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile