Shaoyu Wang

Title: Innovations of Shaoyu Wang in Wafer Processing Technology.

Introduction

Shaoyu Wang is a notable inventor based in Shanghai, China. He has made significant contributions to the field of wafer processing technology. With a total of 2 patents, his work focuses on improving the efficiency and cost-effectiveness of wafer processing methods.

Latest Patents

Wang's latest patents include a "Wafer processing device and method therefor." This invention discloses a wafer processing apparatus designed for pre-alignment and edge exposure of a wafer. The apparatus consists of a pre-alignment module, an edge exposure module, a motion module, a control module, and a rotary table. The motion module features a rotation module, a lifting module, and a translation module, which are arranged and interconnected vertically. The rotation module drives the rotary table to rotate with the wafer, while the lifting module allows for vertical movement. The translation module facilitates horizontal movement. This invention simplifies the pre-alignment operation and reduces equipment costs by minimizing the number of objects to be controlled and the complexity of the control system.

Another significant patent is the "Pre-alignment device and method for wafer." This apparatus includes a wafer stage for carrying the wafer, with alignment marks arranged symmetrically. It features a peripheral vision acquisition system for positional compensation and a mark detection system for capturing images of the alignment marks. This system determines the relative positional relationship of the wafer's center, enhancing the accuracy of the pre-alignment process.

Career Highlights

Shaoyu Wang has worked with prominent companies in the semiconductor industry, including Shanghai Micro Electronics Equipment (Group) Co., Ltd. and Shanghai Micro Electronics Equipment Co., Ltd. His experience in these organizations has contributed to his expertise in wafer processing technologies.

Collaborations

Wang has collaborated with notable colleagues such as Gang Wang and Jie Jiang. Their combined efforts have further advanced the innovations in wafer processing.

Conclusion

Shaoyu Wang's contributions to wafer processing technology through his patents demonstrate his commitment to innovation in the field. His work not only enhances the efficiency of wafer processing but also reduces costs, making significant strides in semiconductor manufacturing.