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Shanghai, China

Shanghai Micro Electronics Equipment (group) Co., Ltd.

USPTO Granted Patents = 94

Trademarks = 1

Forward Citations = 31

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165 inventors (with patents filed for the assignee):

Feibiao Chen (12 out of 12 patents)

Yuebin Zhu (8 out of 8 patents)

Gang Wang (8 out of 55 patents)

4. Hai Xia (7 out of 8 patents)

5. Song Guo (6 out of 6 patents)

6. Xiaoyu Jiang (5 out of 7 patents)

7. Zhiyong Yang (5 out of 8 patents)

8. Chang Jin Zhou (5 out of 14 patents)

9. Fan Wang (4 out of 127 patents)

10. Dongliang Huang (4 out of 4 patents)

11. Hailiang Lu (4 out of 4 patents)

12. Jie Jiang (4 out of 9 patents)

13. Lingyu Li (3 out of 5 patents)

14. Rongjun Zhang (3 out of 5 patents)

15. Zhijun Huo (3 out of 3 patents)

Core Competencies:

Displacement Measuring Apparatus

Lithography Projection Objective

Vacuumizing Device

Semiconductor Manufacturing Apparatus

Automatic Optical Inspection

Spin Coating Device

Wafer Holder

Chip Bonding Device

Photoetching Apparatus

Optical Measurement Device

Coaxial Mask Alignment

Silicon Wafer Processing

94 patents: Sort by Forward Citations

1. 12163814 - Displacement measuring apparatus, displacement measuring method and photolithography device (2024-12-10),

2. 11899181 - Lithography projection objective (2024-02-13),

3. 11664228 - Vacuumizing device and vacuumizing method for bonding substrate (2023-05-30),

4. 11551948 - Semiconductor manufacturing apparatus (2023-01-10),

5. 11549891 - Automatic optical inspection device and method (2023-01-10),

6. 11469121 - Spin coating device and method (2022-10-11),

7. 11383940 - Robot arm for holding cassette and automatic cassette transfer device (2022-07-12),

8. 11367636 - Substrate transfer device, transfer method and photolithography apparatus (2022-06-21),

9. 11326685 - Linear module and operating method thereof (2022-05-10),

10. 11309209 - Wafer holder and wafer transfer apparatus, system and method (2022-04-19),

11. 11152230 - Device and method for bonding alignment (2021-10-19),

12. 11119412 - Exposure equipment and exposure method (2021-09-14),

13. 11107717 - Wafer box conveyor (2021-08-31),

14. 11106143 - Mask fork for transferring mask, and corresponding mask box and mask transferring method (2021-08-31),

15. 11106139 - Optical path compensation device (2021-08-31),

Shanghai Micro Electronics Equipment (Group) Co., Ltd. is a leading provider of semiconductor manufacturing equipment and solutions. With more than 30 years of experience in the industry, the company specializes in the research, development, production, and sales of advanced semiconductor manufacturing equipment. Our products and services cater to various segments of the semiconductor industry, including IC packaging, wafer processing, testing, and more. We are committed to delivering high-quality, reliable, and innovative solutions to our global customers, helping them achieve higher productivity and stay at the forefront of the semiconductor market.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

94 Patents

#36 in Shanghai

#324 in China

#7,948 in the World

Shanghai, China

Shanghai Micro Electronics Equipment (group) Co., Ltd.

Forward Citations = 31

165 inventors:

Feibiao Chen (12 out of 12 patents)

Yuebin Zhu (8 out of 8 patents)

Gang Wang (8 out of 55 patents)

4. Hai Xia (7 out of 8 patents)

5. Song Guo (6 out of 6 patents)

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