The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2022

Filed:

Apr. 28, 2017
Applicant:

Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;

Inventors:

Qixin Xu, Shanghai, CN;

Rong Du, Shanghai, CN;

Lingyu Li, Shanghai, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 47/90 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); B25J 9/16 (2006.01); H01L 21/673 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
B65G 47/905 (2013.01); B25J 9/1697 (2013.01); H01L 21/6735 (2013.01); H01L 21/6773 (2013.01); H01L 21/67724 (2013.01); H01L 21/67775 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); B65G 2201/0297 (2013.01); H01L 21/67379 (2013.01);
Abstract

A robotic manipulator for handling a cassette and an automated cassette transport device are disclosed, the device including a mechanical arm (), an end actuator () at an end of the mechanical arm () and a vision-based locating assembly () on the end actuator (). On the one hand, the vision-based locating assembly () can determine the position of a flange of the cassette, thereby identifying the cassette. In other words, the cassette can be identified based on a feature of the cassette itself. This dispense with a separate locating marker while improving cassette measuring and handling accuracy. On the other hand, transportation of the cassette is allowed by complementary retention of its flange on a recessed surface of the end actuator ().


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