This inventor holds 3 USPTO granted patents. Top assignees: Beijing E-Town Semiconductor Technology, Co., Ltd, Mattson Technology, Inc. Active years: 2021-2023.
Company Filing History:
3 out of 116 
3 out of 285 Years Active: 2021-2023
Title: Shanyu Wang: Innovator in Plasma Processing Technologies
Introduction
Shanyu Wang is a notable inventor based in Fremont, CA, with a focus on advanced processing techniques for workpieces. He holds three patents that showcase his expertise in utilizing plasma technology for various applications. His innovative methods contribute significantly to the field of semiconductor manufacturing and materials processing.
Latest Patents
Shanyu Wang's latest patents include methods for processing workpieces using fluorocarbon plasma. These methods involve conducting thermal treatments on workpieces that contain at least one layer of metal. The process includes generating species from a process gas, which may consist of hydrogen or deuterium. Additionally, the method allows for filtering these species to create a filtered mixture, which is then used to expose the workpiece. Another patent focuses on an oxidation process that can be conducted at temperatures below 350°C. Furthermore, he has developed apparatuses and systems for conducting etch removal processes on workpieces. This includes generating plasma from a deposition process gas to deposit a passivation layer and using an etch process gas to remove specific layers from high aspect ratio structures.
Career Highlights
Throughout his career, Shanyu Wang has worked with prominent companies in the semiconductor industry. He has been associated with Mattson Technology, Inc. and Beijing E-town Semiconductor Technology Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to significant advancements in plasma processing technologies.
Collaborations
Shanyu Wang has collaborated with several professionals in his field, including Chun Yan and Hua Chung. These collaborations have fostered innovation and the exchange of ideas, further enhancing the development of his patented technologies.
Conclusion
Shanyu Wang's contributions to plasma processing technologies through his patents and career experiences highlight his role as an influential inventor in the semiconductor industry. His work continues to impact the field positively, paving the way for future innovations.