Company Filing History:
Years Active: 2012-2013
Title: Innovations by Inventor Shamik Patel
Introduction
Shamik Patel is an accomplished inventor based in Redlands, CA (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on advanced methods for enhancing the performance and reliability of semiconductor devices.
Latest Patents
One of Shamik Patel's latest patents is titled "Silicon nitride passivation layer for covering high aspect ratio features." This patent describes a method of forming a passivation layer comprising silicon nitride on features of a substrate. In the first stage of the deposition method, a dielectric deposition gas, which includes a silicon-containing gas and a nitrogen-containing gas, is introduced into the process zone and energized to deposit a silicon nitride layer. In the second stage, a treatment gas with a different composition is introduced into the process zone and energized to treat the silicon nitride layer. The first and second stages can be performed multiple times to achieve the desired results.
Another notable patent is "Fabrication of through-silicon vias on silicon wafers." This method includes etching a plurality of through holes in a silicon plate. An oxide liner is deposited on the surface of the silicon plate and on the sidewalls and bottom wall of the through holes. A metallic conductor is then deposited in the through holes. Additionally, a silicon nitride passivation layer may be deposited on the exposed back surface of the silicon plate of the substrate, which can be used concurrently with the oxide liner.
Career Highlights
Shamik Patel is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to contribute to cutting-edge technologies that are essential for modern electronics.
Collaborations
Shamik has collaborated with several talented individuals in his field, including Nagarajan Rajagopalan and Ji Ae Park. These collaborations have fostered innovation and have led to advancements in semiconductor manufacturing processes.
Conclusion
Shamik Patel's contributions to semiconductor technology through his patents and work at Applied Materials, Inc. highlight his role as a significant innovator in the industry. His advancements in passivation layers and through-silicon vias are paving the way for future developments in electronics.