Location History:
- Akishimashi, JP (1983 - 1984)
- Tokyo, JP (1985 - 2005)
Company Filing History:
Years Active: 1983-2005
Title: The Innovative Contributions of Setsuo Norioka
Introduction
Setsuo Norioka is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of technology, particularly in the development of advanced testing apparatuses and inspection methods. With a total of 12 patents to his name, Norioka's work has had a substantial impact on various industries.
Latest Patents
One of Norioka's latest patents is a testing apparatus using a scanning electron microscope. This innovative device enables tests and measurements on any part of a test subject in a nondestructive manner, without being limited by the size of the test subject. The apparatus includes a local vacuum formation portion that creates a local vacuum region by blocking the area around the part to be tested from outside air. It features an exhaust portion for forming a partial vacuum, a float means for elevating the local vacuum formation portion above the test subject, and a length measuring means for controlling the floating mechanism.
Another notable patent is a method of inspecting accuracy in stitching pattern elements. This method allows for quick and accurate inspection of the stitching accuracy at which regions of a lithographic pattern are stitched at boundaries. The process involves scanning inspected regions with a charged-particle beam to detect secondary electrons, storing the obtained signals as inspected images, and comparing them with a reference image to identify any deviations.
Career Highlights
Throughout his career, Setsuo Norioka has worked with notable companies, including Jeol Ltd. His expertise in the field has led to the development of groundbreaking technologies that enhance testing and inspection processes.
Collaborations
Norioka has collaborated with talented individuals such as Naoki Date and Yuichi Aki. These partnerships have contributed to the advancement of his innovative projects and patents.
Conclusion
Setsuo Norioka's contributions to technology through his patents and innovative methods have established him as a key figure in his field. His work continues to influence advancements in testing and inspection technologies.