The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2005
Filed:
Jan. 21, 2003
Tetsuo Abe, Kanagawa, JP;
Kouki Okawauchi, Kanagawa, JP;
Tadashi Hattori, Kanagawa, JP;
Hironori Fujita, Kanagawa, JP;
Minoru Takeda, Tokyo, JP;
Yuichi Aki, Tokyo, JP;
Naoki Date, Tokyo, JP;
Setsuo Norioka, Tokyo, JP;
Toshiaki Miyokawa, Tokyo, JP;
Seiichi Nakagawa, Tokyo, JP;
Tetsuo Abe, Kanagawa, JP;
Kouki Okawauchi, Kanagawa, JP;
Tadashi Hattori, Kanagawa, JP;
Hironori Fujita, Kanagawa, JP;
Minoru Takeda, Tokyo, JP;
Yuichi Aki, Tokyo, JP;
Naoki Date, Tokyo, JP;
Setsuo Norioka, Tokyo, JP;
Toshiaki Miyokawa, Tokyo, JP;
Seiichi Nakagawa, Tokyo, JP;
Sony Corporation, Tokyo, JP;
Abstract
A testing apparatus using a scanning electron microscope for enabling tests and measurements on any part of a test subject in a nondestructive way without being limited by a size of the test subject, which is, a testing apparatususing a scanning electron microscope for performing tests and measurements on any part of a test subject in a nondestructive way by using a scanning electron microscope, comprising a local vacuum formation portionfor forming a local vacuum region by blocking around a part to be tested of the test subject from the outside air, wherein the local vacuum formation portion comprises an exhaust portion for exhausting to form a partial vacuum region, a float meansfor floating the whole local vacuum formation portion above the test subject by emitting a compressed gas to an outer circumference portion of the local vacuum formation portion and a length measuring meansfor measuring a distance between the test subject and the local vacuum formation portion for controlling floating of the local vacuum formation portion by the float means.