The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2004
Filed:
Feb. 24, 2003
Yoshihisa Miura, Kanagawa, JP;
Yuichi Aki, Tokyo, JP;
Hiroshi Kawase, Kanagawa, JP;
Masanobu Yamamoto, Kanagawa, JP;
Naoki Date, Tokyo, JP;
Setsuo Norioka, Tokyo, JP;
Mitsuru Koizumi, Tokyo, JP;
Gakuo Komatsubara, Tokyo, JP;
Other;
Abstract
An electron beam irradiation apparatus in a partial vacuum method is structured with a static pressure floating pad connected to a vacuum chamber containing an electron beam column and in a condition that the static pressure floating pad is attached to a subject to be irradiated without contacting, and an electron beam irradiating the subject to be irradiated through an electron beam path of the static pressure floating pad , whereby the vacuum chamber and the electron beam column can be maintained in the required degree of vacuum even in a condition that the static pressure floating pad is separated from the subject to be irradiated. A vacuum seal valve including a piston to open and close the electron beam path is provided within the static pressure floating pad . When the static pressure floating pad is separated from the subject , the vacuum seal valve is structured to be activated to close the electron beam path so as to prevent the air from flowing into the vacuum chamber . In this structure, the vacuum seal valve is formed with a round shaped cross section and in a tapered shape with a narrow tip so as to accomplish high vacuum seal without a gap, so that the degree of vacuum in the vacuum chamber and the electron beam column can surely be maintained.