The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 1985
Filed:
Sep. 22, 1983
Applicant:
Inventors:
Seiichi Nakagawa, Tokyo, JP;
Setsuo Norioka, Tokyo, JP;
Assignee:
Jeol Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
250310 ; 250397 ;
Abstract
A converging lens system of the electron beam scanning device incorporates a condenser lens (or lenses), an objective lens and an aperture means being capable of changing the aperture diameter so as to produce an electron beam spot on a specimen and vary the electron beam current on the specimen. The optimum aperture diameter is determined based on the designated electron beam current and the accelerating voltage of the electron beam by means of a data processor, so that the minimum diameter of the electron beam is formed on the specimen.