Sergey Kamensky

Title: Sergey Kamensky: Innovator in Wafer Technology

Introduction

Sergey Kamensky is a prominent inventor based in Campbell, CA (US). He has made significant contributions to the field of wafer technology, holding a total of 8 patents. His work focuses on improving wafer characterization and classification, which is crucial for advancements in semiconductor manufacturing.

Latest Patents

Kamensky's latest patents include innovative systems and methods for wafer high order shape characterization and wafer classification using wafer dimensional geometry tools. These systems enhance the results of wafer higher order shape characterization by utilizing localized shapes. A wafer map is partitioned into multiple measurement sites to improve the completeness of wafer shape representation. Various site-based higher order shape metric values can be calculated for wafer characterization and classification purposes, serving as control inputs for downstream applications. Additionally, polar grid partitioning schemes are introduced to ensure uniform site areas while providing good coverage of the wafer edge region. Another notable patent involves systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tools. This approach processes phase maps acquired from interferometer wafer geometry tools without the need for phase unwrapping, operating directly in a curvature domain.

Career Highlights

Throughout his career, Kamensky has worked with notable companies, including Kla Tencor Corporation. His expertise in wafer technology has positioned him as a key player in the industry, contributing to advancements that enhance manufacturing processes.

Collaborations

Kamensky has collaborated with esteemed colleagues such as Haiguang Chen and Jaydeep K Sinha. These partnerships have fostered innovation and development in wafer technology.

Conclusion

Sergey Kamensky's contributions to wafer technology through his patents and collaborations highlight his role as an influential inventor in the semiconductor industry. His work continues to pave the way for advancements in wafer characterization and classification.