Company Filing History:
Years Active: 2000-2013
Title: **Innovations of Serge Vanhaelemeersch: A Pioneer in Porous Material Treatments and Microelectronic Fabrication**
Introduction
Serge Vanhaelemeersch is an accomplished inventor based in Leuven, Belgium, holding an impressive portfolio of 21 patents. His work primarily focuses on innovative methods for treating porous materials and advanced techniques in microelectronics, particularly in the production of high aspect ratio vias. His contributions have significantly impacted both the semiconductor and materials science fields.
Latest Patents
Among Serge's latest patents is a method for **Protective Treatment for Porous Materials**. This innovative process involves treating the surface of a porous material in a controlled environment. It includes steps to set specific temperature and pressure conditions, followed by the application of a fluid that solidifies within the material's pores, effectively sealing them. This treatment can enhance surface characteristics, be it through etching or modifications, and ultimately plays a crucial role in advancing material properties.
Another notable patent is the **High Aspect Ratio Via Etch**. Serge has developed a dry etching method designed to pattern deep vias or high aspect ratio vias without the complications of hard mask undercutting. This technique enables the creation of vias with aspect ratios up to 10 in silicon substrates, ensuring smooth sidewalls and sufficient slope for metallization. Such advancements are vital for the integration of three-dimensional stacked semiconductor devices.
Career Highlights
Throughout his career, Serge has made significant strides in the field of microelectronics while working at reputable organizations such as the **Interuniversity Microelectronics Centre (imec)** and **Imec VZW**. His innovative work at these institutions has positioned him as a leading figure in the semiconductor research community, paving the way for future technological advancements.
Collaborations
Serge's journey has been enriched by collaborations with talented individuals, including fellow researchers like Mikhail Rodionovich Baklanov and Karen Irma Maex. These partnerships have fostered a dynamic exchange of ideas and further propelled forward-thinking innovations within their specialized fields.
Conclusion
In summary, Serge Vanhaelemeersch’s contributions to the fields of materials science and microelectronics are characterized by groundbreaking methods and innovative patents. His work not only enhances current technologies but also inspires future research and development efforts in the industry. As a result, Serge’s inventions are a testament to his ingenuity and dedication as an inventor.