The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2013
Filed:
Nov. 13, 2012
Imec, Leuven, BE;
Globalfoundries Inc., Grand Cayman, KY;
Mikhail Baklanov, Veltem-Beisem, BE;
Francesca Iacopi, Leuven, BE;
Serge Vanhaelemeersch, Leuven, BE;
IMEC, Leuven, BE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
A method for treating a surface of a porous material in an environment is provided, comprising setting the temperature of the surface to a value Tand setting the pressure of the environment to a value P, contacting the surface with a fluid having a solidifying temperature at the pressure value Pabove the value Tand having a vaporizing temperature at the pressure value Pbelow 80° C., thereby solidifying the fluid in pores of the material, thereby sealing the pores, treating the surface, wherein the treatment is preferably an etching or a modification of the surface, and setting the temperature of the surface to a value Tand setting the pressure of the environment to a value Pin such a way as to vaporize the fluid.