Company Filing History:
Years Active: 2015-2024
Title: The Innovative Contributions of SeongSue Kim in Semiconductor Technology
Introduction
SeongSue Kim is a distinguished inventor based in Seoul, South Korea, recognized for his significant contributions to the field of semiconductor technology. With an impressive portfolio of 12 patents, Kim has made a name for himself in the innovative landscape, particularly through his work with Samsung Electronics Co., Ltd.
Latest Patents
Among his latest patents are two groundbreaking innovations: a phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device utilizing this technology. The phase shift mask is composed of several layers, including a substrate, a reflective layer, a capping layer, and a unique buffer pattern designed with specific openings and absorbers. This complex structure ensures high precision in lithography processes essential for modern semiconductor manufacturing.
In addition, Kim has developed an apparatus and method for accurately measuring the phase of extreme ultraviolet (EUV) masks. This innovative apparatus features an EUV light source, mirrors for reflecting light, and a detector that captures two-dimensional images, enabling a detailed analysis of reflectivity and diffraction efficiency. By integrating these elements, Kim's invention enhances the accuracy of EUV mask fabrication and measurement.
Career Highlights
Throughout his career, SeongSue Kim has played a vital role at Samsung Electronics, contributing to advancements in semiconductor technologies. His expertise and dedication to innovation have not only propelled his career but also significantly impacted the technology sector, paving the way for next-generation semiconductor devices.
Collaborations
Kim often collaborates with talented colleagues, including fellow researchers Hwanseok Seo and Jongju Park. Together, they push the boundaries of semiconductor research, combining their diverse skills to achieve remarkable advancements in the field.
Conclusion
SeongSue Kim is a notable figure in the realm of semiconductor innovation, with a solid record of patents reflecting his expertise and commitment to technology. His latest inventions, particularly in extreme ultraviolet lithography, underscore his significant contributions to the industry. As he continues to work at Samsung Electronics, the future of semiconductor advancements is bright, with pioneers like Kim leading the charge.