Company Filing History:
Years Active: 2013-2014
Title: Seong-Bo Shim: Innovator in Overlay Measurement and Process Proximity Correction
Introduction
Seong-Bo Shim is a prominent inventor based in Suwon-si, South Korea. He has made significant contributions to the field of measurement and process correction, holding a total of five patents. His work primarily focuses on enhancing the precision of overlay measurements and improving process proximity correction techniques.
Latest Patents
One of his latest patents is titled "Method and apparatus for measuring overlay." This innovative method involves generating an original signal using first and second overlay measurement keys that are spaced apart from each other. The process includes performing a Fourier transform of the original signal to create a first spectrum signal, filtering this signal to generate a second spectrum signal, and finally performing an inverse Fourier transform to produce a corrected signal. Another notable patent is the "Method for process proximity correction." This method entails obtaining a point spread function (PSF) from test patterns that include an etching process. It involves generating a target layout with polygonal patterns, dividing this layout into grid cells, and creating a density map that includes long-range layout densities. The method further includes performing a convolution of these densities with the PSF to obtain long-range etch skews and generating an etch bias model that incorporates both short-range and long-range etch skews.
Career Highlights
Seong-Bo Shim is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop new technologies. His expertise in overlay measurement and process proximity correction has positioned him as a key figure in his field.
Collaborations
Throughout his career, Seong-Bo has collaborated with notable colleagues, including Sang-Wook Kim and Chun-Suk Suh. These collaborations have contributed to the advancement of technologies in their respective areas of expertise.
Conclusion
Seong-Bo Shim's contributions to the fields of overlay measurement and process proximity correction highlight his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving precision in manufacturing processes, making him a valuable asset in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.