Satoshi Ebata

Title: **Satoshi Ebata: Innovator in Acid Generators and Radiation-Sensitive Resins**

Introduction

Satoshi Ebata, based in Tokyo, Japan, is a distinguished inventor known for his contributions to the field of chemistry and material science. With a portfolio of seven patents, Ebata has made significant advancements in the production of acid generators and resin compositions that hold promising applications in various technological sectors.

Latest Patents

Ebata's latest patents focus on revolutionary acid generators, sulfonic acids, sulfonyl halides, and radiation-sensitive resin compositions. His innovations provide novel acid generators that are safe in terms of combustibility and bioaccumulation, allowing for the generation of acids characterized by high acidity and boiling points. These properties promote short diffusion lengths in resist coating films, facilitating the formation of resist patterns with exceptional smoothness and minimal dependency on mask pattern density. The structures of these acid generators are represented by a general formula where R denotes various monovalent substituents, and they are designed to be part of either positive-tone or negative-tone radiation-sensitive resin compositions, catering to diverse industrial needs.

In addition, Ebata developed a sulfonium salt compound that excels in transparency to deep ultraviolet rays at wavelengths of 220 nm or less. This compound demonstrates a well-balanced performance in terms of sensitivity, resolution, and storage stability when utilized as a photoacid generator. The positive-tone radiation-sensitive resin composition that incorporates this compound significantly enhances performance outcomes in various applications.

Career Highlights

Over his career, Satoshi Ebata has worked with esteemed organizations, including JSR Corporation, where he contributed to groundbreaking advancements in materials for electronic applications. His work has propelled innovations that improve the effectiveness and safety of chemical processes and applications in the industry.

Collaborations

Collaboration plays a crucial role in Ebata’s career. He has had the opportunity to work alongside notable colleagues such as Yong Wang and Yasuo Matsuki, further enriching the innovation and research environment that has led to his successful inventions. Their collective expertise has likely contributed to the development of advanced materials and compositions that enhance industrial applications.

Conclusion

Satoshi Ebata's inventiveness and dedication to innovation have established him as a significant figure in the realm of chemical engineering and material science. His patents reflect not only his technical prowess but also the potential impact of his work on future technologies. With a commitment to enhancing both safety and efficacy in chemical applications, Ebata continues to inspire advancements that shape the industry.