This inventor holds 4 USPTO granted patents and 8 published patent applications. Top assignee: Asm IP Holding B.v.. Active years: 2026.
Company Filing History:
3 out of 1,305 Years Active: 2026
Title: SangHeon Yong: Innovator in Substrate Processing Technologies
Introduction
SangHeon Yong is a notable inventor based in Yongin, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 4 patents. His innovative approaches have advanced the technology used in semiconductor manufacturing.
Latest Patents
SangHeon Yong's latest patents include a substrate processing method that features a gap-fill process. This method involves providing a substrate with a gap in its surface to a reaction space. It includes supplying an oligomeric silicon precursor and a nitrogen-containing gas to the reaction space, which results in the formation of a silicon nitride film that has flowability. This film fills at least a portion of the gap while maintaining the reaction space in a plasma state, ultimately densifying the silicon nitride film. Another patent describes a method of processing a substrate with a gap, which includes loading the substrate onto a support unit and generating a direct plasma in a reaction space by applying voltage. This method involves multiple sub-steps during the supply of the silicon precursor and nitrogen gas, with varying plasma duty ratios applied throughout.
Career Highlights
SangHeon Yong is currently employed at ASM IP Holding B.V., where he continues to develop innovative substrate processing technologies. His work has been instrumental in enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
SangHeon Yong collaborates with talented individuals such as HongSuk Kim and Juhyuk Park. Their combined expertise contributes to the advancement of substrate processing technologies.
Conclusion
SangHeon Yong is a prominent inventor whose work in substrate processing has led to significant advancements in the semiconductor industry. His innovative patents and collaborations highlight his commitment to technological progress.