Company Filing History:
Years Active: 2016-2020
Title: Saangrut Sangplung: Innovator in Semiconductor Processing Technology
Introduction
Saangrut Sangplung is a notable inventor based in Sherwood, OR (US). He has made significant contributions to the field of semiconductor processing, holding a total of 8 patents. His work focuses on improving the efficiency and effectiveness of chemical deposition processes.
Latest Patents
One of his latest patents is for a chemical deposition chamber having a gas seal. This innovative apparatus includes a chemical deposition chamber formed within a chemical isolation chamber, featuring a gas seal. The design incorporates a showerhead module with gas inlets that deliver reactor chemistries to a wafer cavity for processing semiconductor substrates. Additionally, the showerhead module has primary exhaust gas outlets to remove reaction gas chemistries and inert gases from the wafer cavity. An inert gas feed delivers seal gas, which flows radially inwardly through a gap between the showerhead module and the pedestal module to form a gas seal. Secondary exhaust gas outlets withdraw some of the inert gas flowing through the gap, providing a high Peclet number.
Another significant patent is for a low volume showerhead with a porous baffle. This design enhances flow uniformity and reduces purge time during atomic layer deposition in semiconductor processing. The showerhead includes a plenum volume, gas inlets in fluid communication with the plenum, and a faceplate with multiple first through-holes for distributing gas onto a substrate. The porous baffle is strategically positioned between the plenum volume and the gas inlets to improve flow uniformity and avoid jetting.
Career Highlights
Saangrut Sangplung is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His work at Lam Research has allowed him to develop innovative solutions that address the challenges faced in semiconductor processing.
Collaborations
Throughout his career, Saangrut has collaborated with notable colleagues, including Shankar Swaminathan and Frank Loren Pasquale. These collaborations have contributed to the advancement of technology in the semiconductor industry.
Conclusion
Saangrut Sangplung is a distinguished inventor whose contributions to semiconductor processing technology have made a significant impact. His innovative patents and work at Lam Research Corporation highlight his dedication to advancing the field.
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