Yokohama, Japan

Ryoh Kawana


Average Co-Inventor Count = 2.5

ph-index = 2

Forward Citations = 9(Granted Patents)


Company Filing History:


Years Active: 2017-2025

Loading Chart...
8 patents (USPTO):Explore Patents

Title: Innovations of Ryoh Kawana

Introduction

Ryoh Kawana is a prominent inventor based in Yokohama, Japan. He has made significant contributions to the field of charged particle beam technology, holding a total of eight patents. His work focuses on enhancing the precision and efficiency of writing apparatuses used in various applications.

Latest Patents

Kawana's latest patents include a multi-charged particle beam writing apparatus and a multi-charged particle beam writing method. The first patent describes an apparatus that allocates an additional dose to a position within a writing target pattern. This adjustment aims to modify the first dose distribution by applying an excessive dose defective beam, resulting in a second dose distribution centered within the target pattern. The apparatus also includes a circuit for correcting the dose by subtracting the increased dose amount generated at the center of the second dose distribution. The second patent outlines a multiple charged particle beam writing apparatus that generates margined block regions. It detects defective beams and specifies their positions, determining the appropriate margined block region based on set conditions.

Career Highlights

Kawana is currently employed at Nuflare Technology, Inc., where he continues to innovate in the field of charged particle beam technology. His expertise has led to advancements that improve the performance and reliability of writing apparatuses.

Collaborations

Throughout his career, Kawana has collaborated with notable colleagues, including Yasuo Kato and Hideo Inoue. These partnerships have contributed to the development of cutting-edge technologies in their field.

Conclusion

Ryoh Kawana's contributions to charged particle beam technology through his patents and collaborations highlight his role as a leading inventor in this specialized area. His work continues to influence advancements in the industry.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…