Utsunomiya, Japan

Ryo Nakayama


Average Co-Inventor Count = 2.1

ph-index = 1

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2015-2025

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9 patents (USPTO):Explore Patents

Title: Ryo Nakayama: Innovator in Detection and Lithography Technologies

Introduction

Ryo Nakayama is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the fields of detection apparatus and lithography technologies. With a total of 9 patents to his name, Nakayama's work has advanced the capabilities of optical systems and manufacturing methods.

Latest Patents

Among his latest patents, Nakayama has developed a detection apparatus that includes an image sensing device with a first periodic structure. This apparatus is designed to illuminate a detection target featuring a second periodic structure, allowing for the formation of an image of light on the image sensing plane. The technology generates multiple diffracted light beams of varying orders, enhancing the precision of detection. Another notable patent involves a detection apparatus that identifies position deviations between an original and a substrate. This system utilizes an illumination optical system to illuminate diffraction gratings on both the original and the substrate, detecting interference light formed by the diffracted beams.

Career Highlights

Ryo Nakayama is currently employed at Canon Kabushiki Kaisha, where he continues to innovate in the field of optical technologies. His work has been instrumental in improving the accuracy and efficiency of lithography processes.

Collaborations

Nakayama has collaborated with notable colleagues, including Hiroyuki Ishii and Takahiro Matsumoto. Their combined expertise has contributed to the development of advanced technologies in their field.

Conclusion

Ryo Nakayama's contributions to detection and lithography technologies have established him as a key figure in innovation. His patents reflect a commitment to enhancing optical systems and manufacturing methods, paving the way for future advancements in the industry.

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