Roy D McGregor

Title: Roy D McGregor: Innovator in EUV Laser Technology

Introduction

Roy D McGregor is a prominent inventor based in El Camino Village, California. He has made significant contributions to the field of extreme ultraviolet (EUV) laser technology, holding a total of 7 patents. His work focuses on innovative solutions to enhance the efficiency and stability of EUV radiation sources.

Latest Patents

Among his latest patents is a groundbreaking invention titled "Erosion reduction for EUV laser produced plasma target sources." This patent describes a laser-plasma EUV radiation source that employs various methods to prevent the vaporization of material from the nozzle assembly. One approach involves using an electrically isolating nozzle end, such as a glass capillary tube, which extends beyond the conductive surfaces of the nozzle assembly. This design ensures that the pressure around the closest conducting portion is low enough to prevent arcing. Additionally, the patent outlines methods for providing electrical isolation of the conductive portions from the vacuum chamber wall and applying a bias potential to the nozzle assembly.

Another notable patent is "Droplet and filament target stabilizer for EUV source nozzles." This invention creates a stable solid target filament for an EUV radiation source. The nozzle assembly includes a condenser chamber that cryogenically cools a gaseous target material into a liquid state. The liquid target material is then forced through an orifice into an evaporation chamber, where it freezes into a stable target filament. This innovation allows for the stable emission of the target filament into the process chamber.

Career Highlights

Roy D McGregor has worked with esteemed organizations such as Northrop Grumman Systems Corporation and the University of Central Florida Research Foundation, Inc. His experience in these institutions has contributed to his expertise in laser technology and innovation.

Collaborations

Throughout his career, McGregor has collaborated with notable colleagues, including Michael B Petach and Rocco A Orsini. These partnerships have furthered his research and development efforts in the field of EUV technology.

Conclusion

Roy D McGregor's contributions to EUV laser technology through his innovative patents and collaborations highlight his significant impact on the field. His work continues to pave the way for advancements in laser applications and technology.