The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2003
Filed:
May. 03, 2001
Rocco A. Orsini, Long Beach, CA (US);
Michael B. Petach, Redondo Beach, CA (US);
Roy D. McGregor, El Camino Village, CA (US);
Northrop Grumman Corporation, Los Angeles, CA (US);
Abstract
A nozzle ( ) for a laser-plasma EUV radiation source that provides thermal isolation between the nozzle body ( ) and the target material flowing therethrough. A target delivery tube ( ) is provided that extends through the nozzle body ( ). The delivery tube ( ) has an expansion aperture ( ) positioned behind an exit collimator ( ) of the nozzle body ( ). The delivery tube ( ) is made of a low thermal conductivity material, such as stainless steel, and is in limited contact with the nozzle body ( ) so that heating of the nozzle body ( ) from the plasma does not heat the liquid target material being delivered through the delivery tube ( ). The expansion aperture ( ) has a smaller diameter than the exit collimator ( ).