The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
Apr. 25, 2000
Roy D. McGregor, El Camino Village, CA (US);
Charles W. Clendening, Jr., Torrance, CA (US);
Northrop Grumman Corporation, Los Angeles, CA (US);
Abstract
A gas jet nozzle ( ) for an extreme-ultraviolet light (EUV) source, including a housing ( ) having a front ( ) and a back ( ). The housing ( ) is coupleable to a primary gas source ( ) and a secondary gas source ( ) and is adapted to. expel primary gas ( ) and secondary gas ( ) from the housing front ( ). The housing ( ) has a gas-expelling primary channel ( ) located centrally within the housing ( ) and a gas-expelling secondary channel ( ) proximate the primary channel ( ). The primary channel ( ) may be circular and the secondary channel ( ) may be annular, surrounding the primary channel ( ). A secondary gas stream ( ) expelled from the secondary channel ( ) restricts the lateral expansion of a primary gas stream ( ) expelled from the primary channel ( ), optimizing gas jet properties and reducing heating and erosion of the nozzle ( ).