This inventor holds 6 USPTO granted patents and 1 published patent application. Top assignee: Texas Instruments Corporation. Active years: 2003-2016.
Company Filing History:
Years Active: 2003-2016
Title: Innovations of Ronald Charles Roth
Introduction
Ronald Charles Roth is a notable inventor based in McKinney, TX (US). He has made significant contributions to the field of microelectromechanical systems (MEMS) and holds a total of 6 patents. His work has been instrumental in advancing technologies that utilize MEMS devices.
Latest Patents
One of his latest patents is for a MEMS device with improved via support planarization. This invention features a movable member supported above a substrate on a via support, fabricated integrally from first and second member forming layers. The design includes a first member forming layer that creates a lower part of the member and supporting structure for the via support. Additionally, first and second fill layers are deposited and patterned to form a plug that fills an inner cavity opening in the via structure. The plug is then planarized to a planar part of the first member forming layer, with a second member forming layer deposited over it to complete the upper part of the member. The via support may also have a cavity filled by BARC layers.
Another significant patent involves an etching method for use in deep-ultraviolet lithography. In this process, the applied ultraviolet resist can be removed by intentionally condensing the ultraviolet resist before its removal. This innovative approach enhances the efficiency of lithography processes.
Career Highlights
Ronald Charles Roth has had a distinguished career at Texas Instruments Corporation, where he has been able to apply his expertise in MEMS technology. His work has contributed to the development of advanced electronic devices that leverage MEMS for improved performance and functionality.
Collaborations
Throughout his career, Ronald has collaborated with notable colleagues, including Lucius Marshall Sherwin and Timothy J Hogan. These partnerships have fostered innovation and have led to the successful development of various technologies.
Conclusion
Ronald Charles Roth's contributions to the field of MEMS and his innovative patents have significantly impacted technology. His work continues to inspire advancements in microelectromechanical systems and related fields.